Open Access0-level Vacuum Packaging RT Process for MEMS Resonators
Author(s) -
N. Abele,
Daniel Grogg,
C. Hibert,
Fabrice Casset,
Pascal Ancey,
Adrian M. Ionescu
Publication year - 2007
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , resonator , vacuum packing , process (computing) , computer science , optoelectronics , materials science , electronic engineering , engineering , mechanical engineering , operating system