Open AccessPASChAC, système automatisé de caractérisation de composants sur wafer
Author(s) -
Bertrand Vergne,
Gontran Pâques,
Claudia Maurer,
Sigo Scharnholz,
Pierre Brosselard,
Dominique Planson
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - French
Resource type - Conference proceedings
Subject(s) - humanities , wafer , physics , art , optoelectronics
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