Open AccessTriboactive surfaces in multi-asperity nanotribology
Author(s) -
Philippe Stempflé,
Anne Domatti,
Pascal Carrière,
Olivier Pantalé,
Jean Cote,
J. Takadoum
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - deep reactive ion etching , materials science , octadecyltrichlorosilane , nanotribology , wafer , silicon , tribology , wetting , nanotechnology , nanoindenter , tribometer , composite material , etching (microfabrication) , monolayer , reactive ion etching , optoelectronics , nanoindentation , layer (electronics)
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