Open AccessA macro model based on finite element method to investigate temperature and residual stress effects on RF MEMS switch actuation
Author(s) -
David Peyrou,
Hikmat Achkar,
Fabienne Pennec,
Patrick Pons,
Robert Plana
Publication year - 2007
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - finite element method , macro , microelectromechanical systems , residual stress , stress (linguistics) , materials science , electronic engineering , residual , computer science , mechanical engineering , structural engineering , engineering , optoelectronics , algorithm , composite material , programming language , linguistics , philosophy