Open AccessCharacterization of a 2-dof MEMS nanopositioner with integrated electrothermal actuation and sensing capability.
Author(s) -
Micky Rakotondrabe,
Anthony Fowler,
S. O. Reza Moheimani
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , characterization (materials science) , actuator , materials science , computer science , electronic engineering , optoelectronics , electrical engineering , engineering , nanotechnology