Open AccessPotential energy sputtering of EUVL materials
Author(s) -
J. M. Pomeroy,
L. P. Ratliff,
J. D. Gillaspy,
S. Bajt
Publication year - 2004
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Book series
Subject(s) - sputtering , materials science , extreme ultraviolet lithography , engineering physics , optoelectronics , nanotechnology , physics , thin film
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