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Transmission Electron Microscopy Specimen Preparation for Two Dimensional Material Using Electron Beam Induced Deposition of a Protective Layer in the Focused Ion Beam Method
Author(s) -
ByeongSeon An,
Yeon Ju Shin,
Jae-Seon Ju,
CheolWoong Yang
Publication year - 2018
Publication title -
han-guk hyeonmigyeong hakoeji/applied microscopy
Language(s) - English
Resource type - Journals
eISSN - 2287-4445
pISSN - 2234-6198
DOI - 10.9729/am.2018.48.4.122
Subject(s) - transmission electron microscopy , electron beam induced deposition , focused ion beam , materials science , layer (electronics) , ion beam , cathode ray , electron microscope , deposition (geology) , energy filtered transmission electron microscopy , electron tomography , beam (structure) , transmission (telecommunications) , ion , electron , optoelectronics , nanotechnology , optics , scanning transmission electron microscopy , chemistry , physics , electrical engineering , engineering , paleontology , organic chemistry , quantum mechanics , sediment , biology

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