Open AccessResolution in Carrier Profiling Semiconductors by Scanning Spreading Resistance Microscopy and Scanning Frequency Comb Microscopy
Author(s) -
Mark J. Hagmann,
Marwan S. Mousa,
Dmitry Yarotski
Publication year - 2017
Publication title -
han-guk hyeonmigyeong hakoeji/applied microscopy
Language(s) - English
Resource type - Journals
eISSN - 2287-4445
pISSN - 2234-6198
DOI - 10.9729/am.2017.47.3.95
Subject(s) - mesoscopic physics , spreading resistance profiling , microscopy , semiconductor , materials science , scanning probe microscopy , resolution (logic) , optoelectronics , scanning capacitance microscopy , scanning gate microscopy , scanning ion conductance microscopy , lithography , optics , scanning confocal electron microscopy , nanotechnology , doping , physics , computer science , quantum mechanics , artificial intelligence
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