A study on the Initial Nanopore Formation in the Calix Arene Based Porogen Templated Porous Thin Film | Zendy

Dohun Kim | Zendy; JinHeong Yim | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

A study on the Initial Nanopore Formation in the Calix Arene Based Porogen Templated Porous Thin Film

Author(s) -

Dohun Kim,

JinHeong Yim

Publication year - 2011

Publication title -

korean chemical engineering research

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.168

H-Index - 9

eISSN - 2233-9558

pISSN - 0304-128X

DOI - 10.9713/kcer.2011.49.5.669

Subject(s) - silsesquioxane , fourier transform infrared spectroscopy , materials science , nanopore , spectroscopy , thin film , x ray photoelectron spectroscopy , molecule , crystallography , chemical engineering , nanotechnology , chemistry , organic chemistry , composite material , polymer , physics , quantum mechanics , engineering

Fourier Transform Infrared Spectroscopy and in-situ Position Annihilation Lifetime Spectroscopy(PALS) analysis of hybrid film, which consist of silsesquioxane(SSQ) and 4-tert-butyl calix[4]arene-O,O`,O",O`"-tetraacetic acid tetraethyl ester(CA[4]) have been investigated in order to understand initial formation of nanopore in the next generation porous low-k dielectrics(k , while mesopores(2.5~3.0 nm) induced from self assembled CA[4] have been generated at . It might be due to highly interconnected structure of SSQ/CA[4] 20% hybrid thin film resulting in facile evacuating of decomposed fragment of CA[4] molecule.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research