Open AccessMorphology Study of Si Surface Topography Irradiated by Ar Ion Beam Sputtering
Author(s) -
Hongmei Bi,
Ying Li,
B. Wang
Publication year - 2015
Publication title -
chemical science transactions
Language(s) - English
Resource type - Journals
eISSN - 2278-3458
pISSN - 2278-3318
DOI - 10.7598/cst2015.1032
Subject(s) - irradiation , chemistry , sputtering , crystal (programming language) , ion , raman spectroscopy , surface roughness , ion beam , surface finish , beam (structure) , silicon , analytical chemistry (journal) , optics , thin film , nanotechnology , materials science , composite material , nuclear physics , physics , organic chemistry , chromatography , computer science , programming language