Open AccessMn<sub>2</sub>O<sub>3</sub> Slurry Reuse for SiO<sub>2</sub> Film CMP
Author(s) -
Sadahiro Kishii,
Kazuki Nakamura,
Kenzo Hanawa,
S. Watanabe,
Y. Arimoto,
Syuuhei KUROKAWA,
Toshiroh Doi
Publication year - 2011
Publication title -
extended abstracts of the 2020 international conference on solid state devices and materials
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.7567/ssdm.2011.p-2-3
Subject(s) - materials science , slurry , reuse , waste management , engineering , composite material
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom