Open AccessOrdered Structure in Buried Oxide Layers of SOI Wafers
Author(s) -
Takayoshi Shimura,
Takuji Hosoi,
Riho Ejiri,
M. Umeno
Publication year - 1999
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.38s1.297
Subject(s) - wafer , silicon on insulator , epitaxy , materials science , diffraction , oxide , perpendicular , optoelectronics , layer (electronics) , substrate (aquarium) , insulator (electricity) , silicon , crystallography , nanotechnology , optics , chemistry , metallurgy , physics , geometry , mathematics , oceanography , geology
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