Open AccessCrystallinity Analysis of Amorphous-Crystalline Mixed Phase Silicon Films Using EXAFS Method
Author(s) -
Masatoshi Wakagi,
Toshiki Kaneko,
Kiyoshi Ogata,
A. Nakano
Publication year - 1993
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.32s2.646
Subject(s) - extended x ray absorption fine structure , amorphous solid , crystallinity , annealing (glass) , raman spectroscopy , materials science , analytical chemistry (journal) , phase (matter) , silicon , crystallography , absorption spectroscopy , chemistry , optics , chromatography , organic chemistry , physics , composite material , metallurgy
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