Open AccessUltra-Microhardness of Some Vacuum-Deposited Films
Author(s) -
Mineo Nishibori,
Koreo Kinosita
Publication year - 1974
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.2s1.a862b
Subject(s) - materials science , indentation hardness , penetration (warfare) , composite material , thin film , cleavage (geology) , diamond , analytical chemistry (journal) , optics , chemistry , nanotechnology , microstructure , physics , chromatography , operations research , fracture (geology) , engineering
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