Open AccessStarting Characteristics of Triode and Diod Sputter-Ion Pumps
Author(s) -
Akio Konishi,
Sanetada Mizumachi
Publication year - 1974
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.2s1.65
Subject(s) - triode , ion pump , diode , outgassing , torr , ion , sputtering , materials science , vacuum chamber , optics , volume (thermodynamics) , atomic physics , chemistry , optoelectronics , physics , voltage , thin film , capacitor , nanotechnology , organic chemistry , quantum mechanics , composite material , thermodynamics
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