Open AccessA New Series of Turbomolecular Pumps
Author(s) -
W. Bächler,
Roman G. Frank,
E. Usselmann
Publication year - 1974
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.2s1.13
Subject(s) - series (stratigraphy) , compression ratio , volume (thermodynamics) , volumetric flow rate , rotor (electric) , reliability (semiconductor) , mechanics , flow (mathematics) , inlet , rotational speed , mechanical engineering , compression (physics) , rotation (mathematics) , materials science , environmental science , mathematics , thermodynamics , physics , engineering , geology , composite material , geometry , power (physics) , paleontology , internal combustion engine
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