Open AccessDetection and Application of Acoustic Emission in Laser-Enhanced Chemical Etching
Author(s) -
Tadashi Shiosaki,
Hiroshi Masuda,
Masatoshi Adachi,
Akira Kawabata
Publication year - 1987
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.26s1.230
Subject(s) - laser , materials science , ceramic , acoustic emission , etching (microfabrication) , isotropic etching , irradiation , machining , optoelectronics , photoacoustic imaging in biomedicine , optics , metallurgy , composite material , layer (electronics) , physics , nuclear physics
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