Open Access(Invited) Characterization of Semi-Insulating GaAs Substrates for GaAs ICs
Author(s) -
Shintaro Miyazawa,
Yasushi Nanishi
Publication year - 1983
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.22s1.419
Subject(s) - ingot , homogeneity (statistics) , dislocation , materials science , doping , condensed matter physics , optoelectronics , crystallography , composite material , chemistry , physics , statistics , mathematics , alloy
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