Open AccessAn Improved Micro-Fabrication Technique for Aluminum Electrode of Surface-Acoustic-Wave Transducers
Author(s) -
Kiyoshi Asakawa,
K. Nishikawa
Publication year - 1977
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjaps.16s1.487
Subject(s) - fabrication , transducer , surface acoustic wave , electrode , materials science , aluminium , acoustics , interdigital transducer , surface (topology) , optoelectronics , composite material , chemistry , physics , medicine , alternative medicine , pathology , geometry , mathematics
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