Observation of Magnesium-Induced Crystallization (Mg-MIC) of a-Si Thin Film | Zendy

Takashi Ikehata | Zendy; Ryota Sasajima | Zendy; Motomu Saijo | Zendy; Naoyuki Sato | Zendy; Haruhiko Udono | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Observation of Magnesium-Induced Crystallization (Mg-MIC) of a-Si Thin Film

Author(s) -

Takashi Ikehata,

Ryota Sasajima,

Motomu Saijo,

Naoyuki Sato,

Haruhiko Udono

Publication year - 2020

Language(s) - English

Resource type - Conference proceedings

DOI - 10.7567/jjapcp.8.011002

Subject(s) - crystallization , magnesium , materials science , thin film , metallurgy , chemical engineering , nanotechnology , engineering

Magnesium induced crystallization (Mg-MIC), that is, the low temperature crystallization process of an amorphous silicon (a-Si) film activated by magnesium has first been investigated. The crystallization temperature is evaluated as low as 450 ̊C from Raman spectroscopy in contrast to 600 ̊C-800 ̊C in the solid phase crystallization (SPC) process (only a-Si film is heated). The crystallization is found to occur via the formation of intermediate phase: the silicide (Mg2Si) as reported in the Ni-MIC studies. A filamentary structure expected from the previous studies is not observed.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research