Effects of lattice deformations on Raman spectra in β-FeSi2epitaxial films | Zendy

Yoshikazu Terai | Zendy; Haruki Yamaguchi | Zendy; Hiroaki Tsukamoto | Zendy; Tetsu Hattori | Zendy; Takahiko Higashi | Zendy

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Effects of lattice deformations on Raman spectra in β-FeSi₂epitaxial films

Author(s) -

Yoshikazu Terai,

Haruki Yamaguchi,

Hiroaki Tsukamoto,

Tetsu Hattori,

Takahiko Higashi

Publication year - 2015

Language(s) - English

Resource type - Conference proceedings

DOI - 10.7567/jjapcp.3.011109

Subject(s) - raman spectroscopy , epitaxy , materials science , annealing (glass) , spectral line , lattice (music) , condensed matter physics , analytical chemistry (journal) , crystallography , nanotechnology , optics , chemistry , composite material , physics , layer (electronics) , astronomy , acoustics , chromatography

Effects of lattice deformations on Raman spectra were investigated in β-FeSi2 epitaxial films grown on Si substrates. The lattice of the epitaxial film was deformed depending on thermal-annealing temperature (Ta). In Raman spectra, Raman lines of Ag-mode (iron displacements) showed a frequency shift with increasing Ta. The shift of Raman lines showed that the residual strain in the epitaxial films was changed by the lattice deformation. In the temperature dependence of Raman spectra, the temperature shifts of the Raman lines were found to be different between β-FeSi2(100)//Si(001) and β-FeSi2(110)(101)//Si(111) epitaxial films.

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