Open AccessStudy of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs
Author(s) -
Benjamin Reig,
V. Bardinal,
JeanBaptiste Doucet,
E. Daran,
Thierry Camps,
Maëlenn Aufray,
A. Lamure,
Claire Tendero
Publication year - 2014
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjap.53.08mc03
Subject(s) - microlens , materials science , wafer , optoelectronics , reliability (semiconductor) , temperature cycling , optics , laser , thermal , core (optical fiber) , polymer , thermal stability , epoxy , composite material , lens (geology) , power (physics) , physics , quantum mechanics , meteorology
International audienceWe present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications
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