Open AccessProposal of Silicon on Insulator Reach through APDs for Soft X-ray Imaging Optimized by TCAD Simulation
Author(s) -
Ryutaro Hamasaki,
Akihiro Koyama,
Kenji Shimazoe,
T. Miyoshi,
T. Tsuboyama,
Ikuo Kurachi,
Shunji Kishimoto,
Y. Arai
Publication year - 2019
Language(s) - English
Resource type - Conference proceedings
DOI - 10.7566/jpscp.27.012017
Subject(s) - apds , silicon on insulator , silicon , materials science , optoelectronics , electrical engineering , computer science , engineering , avalanche photodiode , detector
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