Open AccessLangmuir Probe Measurement for Sputtering Deposition Using Several Size of Metal Powder Target
Author(s) -
Hiroharu Kawasaki,
Tamiko Ohshima,
Takeshi Ihara,
Daichi Taniyama,
Satoshi Takeichi,
Yoshihito Yagyu,
Yoshiaki Suda
Publication year - 2014
Publication title -
proceedings of the 12th asia pacific physics conference (appc12)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.7566/jpscp.1.015065
Subject(s) - sputtering , deposition (geology) , langmuir probe , materials science , metal , metallurgy , analytical chemistry (journal) , plasma , chemistry , plasma diagnostics , nanotechnology , thin film , environmental chemistry , geology , nuclear physics , physics , paleontology , sediment
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