Effects Of Negative Ag Ions On The Surface Of (200) Single-Crystalline MgO Substrates

Negative silver ions with energies between 200 eV and 700 eV are extracted from a plasma sputter-type negative ion source to process single crystal MgO from samples using a plasma sputter-type negative ion source. X-ray diffraction measurement results reveal that samples processed by 200 eV and 500 eV ion energies exhibited deposition of silver while the sample bombarded with 700 eV ion energy showed signs of surface modification that led to amorphization. Theoretically predicted XRD curves constructed from the deformed lattice of silver provide a good fit to the experimentally measured ones for the sample bombarded with 200 eV ion energy.