Low cost digital vibration meter | Zendy

W Vance Payne | Zendy; Jon Geist | Zendy

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Low cost digital vibration meter

Author(s) -

W Vance Payne,

Jon Geist

Publication year - 2007

Publication title -

journal of research of the national institute of standards and technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.202

H-Index - 59

eISSN - 2165-7254

pISSN - 1044-677X

DOI - 10.6028/jres.112.009

Subject(s) - vibration , metre , cantilever , acoustics , acceleration , beam (structure) , signal (programming language) , perpendicular , accelerometer , microelectromechanical systems , materials science , physics , optics , computer science , optoelectronics , mathematics , geometry , classical mechanics , quantum mechanics , astronomy , composite material , programming language

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.

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