Phase identification in a scanning electron microscope using backscattered electron Kikuchi patterns | Zendy

Raymond P. Goehner | Zendy; J.R. Michael | Zendy

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Phase identification in a scanning electron microscope using backscattered electron Kikuchi patterns

Author(s) -

Raymond P. Goehner,

J.R. Michael

Publication year - 1996

Publication title -

journal of research of the national institute of standards and technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.202

H-Index - 59

eISSN - 2165-7254

pISSN - 1044-677X

DOI - 10.6028/jres.101.031

Subject(s) - scanning electron microscope , magnification , materials science , electron , environmental scanning electron microscope , conventional transmission electron microscope , optics , electron microscope , microscope , electron beam induced deposition , phase (matter) , scanning transmission electron microscopy , low voltage electron microscope , scanning confocal electron microscopy , analytical chemistry (journal) , physics , chemistry , chromatography , quantum mechanics

Backscattered electron Kikuchi patterns (BEKP) suitable for crystallographic phase analysis can be collected in the scanning electron microscope (SEM) with a newly developed charge coupled device (CCD) based detector. Crystallographic phase identification using BEKP in the SEM is unique in that it permits high magnification images and BEKPs to be collected from a bulk specimen. The combination of scanning electron microscope (SEM) imaging, BEKP, and energy dispersive x-ray spectrometry holds the promise of a powerful new tool for materials science.

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