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Supply voltage compensation is important to keep the accuracy for hot wire/hot film gas flow sensors. A compensation experiment device is established, the two steps curve fitting is presented to determine the functional relations among flow、sensor output and supply voltage, the coefficient of fitting polynomial is determined by Least Square method, thus eliminating the influence of supply voltage variations. After compensation, the error is reduced to 2%. The algorithm is stabilized, easily to be fullfilled in microcontroller unit.

Supply Voltage Compensation of Hot Wire Flow Measurement Device