Six-Dimensional Hybrid Broadband Vibration Isolation Based on Singular Parallel Mechanisms

Six-dimensional broadband vibration isolation is necessary for precision manufacturing, testing and assembly. A six-dimensional nearly zero-stiffness mechanism based on singular parallel mechanisms was proposed, which was taken as the main structure of the vibration isolator to reduce the system's natural frequency. Then control methods of configure maintenance and active vibration isolation were researched using feedback linearization and H∞ robust control means. Finally six-dimensional active and passive vibration isolation control simulations were carried out respectively. The simulation results show that the vibration isolator has higher six-dimensional broadband vibration isolation capability and feasibility