Open AccessAdaptive Mesh Method Applied to Poisson Solver Module for 3D Capacitively Coupled Plasma Discharge Simulation
Author(s) -
Sora Lee,
Yejin Shon,
Dong-Gil Kim,
Deuk-Chul Kwon,
Hee Hwan Choe
Publication year - 2020
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2020.29.3.062
Subject(s) - solver , capacitively coupled plasma , plasma , computer science , computational science , physics , inductively coupled plasma , nuclear physics , programming language
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