Open AccessA Brief Review of Electron Kinetics in Radio-Frequency Plasmas
Author(s) -
HyoChang Lee
Publication year - 2019
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2019.28.4.79
Subject(s) - kinetics , plasma , physics , electron , atomic physics , nuclear physics , quantum mechanics
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