Open AccessStudy of Ion Beam Shaping of an Anode-Type Ion Source Coupled with a Whenelt Mask
Author(s) -
Yunsung Huh,
Yunseok Hwang,
Jeha Kim
Publication year - 2018
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2018.27.4.70
Subject(s) - anode , ion beam , ion , beam (structure) , ion source , materials science , atomic physics , ion beam deposition , ion gun , optics , focused ion beam , front (military) , optoelectronics , physics , electrode , quantum mechanics , meteorology
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