Effect of Ar ion Sputtering on the Surface Electronic Structure of Indium Tin Oxide | Zendy

Hyunbok Lee | Zendy; Sang Wan Cho | Zendy

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Effect of Ar ion Sputtering on the Surface Electronic Structure of Indium Tin Oxide

Author(s) -

Hyunbok Lee,

Sang Wan Cho

Publication year - 2016

Publication title -

applied science and convergence technology

Language(s) - English

Resource type - Journals

eISSN - 2288-6559

pISSN - 1225-8822

DOI - 10.5757/asct.2016.25.6.128

Subject(s) - sputtering , x ray photoelectron spectroscopy , indium tin oxide , work function , indium , analytical chemistry (journal) , ion , secondary ion mass spectrometry , materials science , ultraviolet photoelectron spectroscopy , chemistry , metal , thin film , nanotechnology , chemical engineering , optoelectronics , metallurgy , chromatography , organic chemistry , engineering

We investigated the effect of Ar ion sputtering on the surface electronic structure of indium tin oxide (ITO) using X-ray and ultraviolet photoelectron spectroscopy (XPS and UPS) measurements with increasing Ar ion sputtering time. XPS measurements revealed that surface contamination on ITO was rapi...

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