Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum | Zendy

Yuqi Xue | Zendy; Zixin Wang | Zendy; Jun Wang | Zendy; Changji Hu | Zendy; Fangyan Xie | Zendy; Dihu Chen | Zendy; Zhenhui He | Zendy

Open Access

Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum

Author(s) -

Yuqi Xue,

Zixin Wang,

Jun Wang,

Changji Hu,

Fangyan Xie,

Dihu Chen,

Zhenhui He

Publication year - 2012

Publication title -

isrn spectroscopy

Language(s) - English

Resource type - Journals

ISSN - 2090-8776

DOI - 10.5402/2012/963298

Subject(s) - hydrogen , argon , analytical chemistry (journal) , materials science , x ray photoelectron spectroscopy , diamond like carbon , carbon fibers , diamond , chemistry , nanotechnology , nuclear magnetic resonance , thin film , physics , composite number , metallurgy , composite material , organic chemistry , chromatography

Modification of hydrogen-free diamond-like carbon (DLC) is presented, with acrylic acid (AA) vapor carried into a vacuum chamber by argon and with the in situ assistance of low-power radio frequency (RF) plasma at a temperature below 100°C. Measured by atomic force microscopy (AFM) technique, the roughness () of the DLC was nm. XPS and FT-IR spectra analysis showed that carboxyl groups were immobilized on the surface of the DLC films, with about 40% of carboxyl group area coverage. It was found that the RF plasma and reaction time are important in enhancing the modification rate and efficiency.

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