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Generally, the yield rate of semiconductors is the major factor that affects directly the price of semiconductors. For a high yield rate of semiconductors, the air inside clean room is needed to be purified and high efficient filters are used for this. The filter are made of super-fine fiber and certain pinholes can be easily produced on the filter's surface by inadvertent manufacturing. As these pinholes are not easily detected with the bare sight, these pinholes exert a negative impact to filtration performance of the filter. In this research, not only the automatic test equipment for detecting pinholes is proposed, but also inverse modeling scheme based on artificial neural network is applied for tuning of its important parameters.

Application of Neural Inverse Modeling Scheme to Optimal Parameter Tuning of Filter Test Equipment