High Uniformity Design of UV LED Illuminators for Exposure Equipment | Zendy

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High Uniformity Design of UV LED Illuminators for Exposure Equipment

Author(s) -

Chun-Han Chou,

YuHsuan Lin,

HsinYi Tsai,

Ray-Ching Hong,

YiYung Chen

Publication year - 2021

Language(s) - English

Resource type - Conference proceedings

DOI - 10.5220/0010222300680072

Subject(s) - optoelectronics , light emitting diode , materials science , environmental science , computer science

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