Open AccessMechanical Characterization of Nanoporous Silicon Membranes using Elastic Guided Waves
Author(s) -
Marc Thelen,
Nicolás Bochud,
Manuel Brinker,
Claire Prada,
Patrick Huber
Publication year - 2020
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.48465/fa.2020.0809
Subject(s) - membrane , materials science , characterization (materials science) , nanoporous , silicon , composite material , nanotechnology , optoelectronics , chemistry , biochemistry