Open AccessImproved modelling of a MEMS transducer with a planar micro- beam and a reduced-size backplate
Author(s) -
Petr Honzík,
Antonín Novák,
Stéphane Durand,
Nicolas Y. Joly,
Michel Bruneau
Publication year - 2020
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.48465/fa.2020.0642
Subject(s) - transducer , microelectromechanical systems , planar , materials science , beam (structure) , acoustics , engineering , computer science , optoelectronics , physics , structural engineering , computer graphics (images)