New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components | Zendy

Alexandre Clairet | Zendy; E. Courjon | Zendy; Thierry Laroche | Zendy; Florent Bernard | Zendy; Alexandre Raveski | Zendy; Eric Michoulier | Zendy; Gabrielle Aspar | Zendy; Christophe Didier | Zendy; Isabelle Huyet | Zendy; E. Butaud | Zendy; Aymen Ghorbel | Zendy; B. Tavel | Zendy; Alexis Drouin | Zendy; Sylvain Ballandras | Zendy

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New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components

Author(s) -

Alexandre Clairet,

E. Courjon,

Thierry Laroche,

Florent Bernard,

Alexandre Raveski,

Eric Michoulier,

Gabrielle Aspar,

Christophe Didier,

Isabelle Huyet,

E. Butaud,

Aymen Ghorbel,

B. Tavel,

Alexis Drouin,

Sylvain Ballandras

Publication year - 2020

Publication title -

hal (le centre pour la communication scientifique directe)

Language(s) - English

Resource type - Conference proceedings

DOI - 10.48465/fa.2020.0157

Subject(s) - lithium tantalate , lithium niobate , piezoelectricity , surface acoustic wave , computer science , materials science , flexibility (engineering) , acoustic wave , unimorph , substrate (aquarium) , electronic engineering , layer (electronics) , acoustics , optoelectronics , electrical engineering , engineering , physics , nanotechnology , statistics , mathematics , oceanography , geology

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