Open AccessNew generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components
Author(s) -
Alexandre Clairet,
E. Courjon,
Thierry Laroche,
Florent Bernard,
Alexandre Raveski,
Eric Michoulier,
Gabrielle Aspar,
Christophe Didier,
Isabelle Huyet,
E. Butaud,
Aymen Ghorbel,
B. Tavel,
Alexis Drouin,
S. Ballandras
Publication year - 2020
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.48465/fa.2020.0157
Subject(s) - silicon , materials science , composite number , layer (electronics) , acoustic wave , acoustics , surface acoustic wave , composite material , optoelectronics , physics