Open AccessSingle electrode voltage clamp
Author(s) -
Alan S. Finkel
Publication year - 2007
Publication title -
scholarpedia
Language(s) - English
Resource type - Journals
ISSN - 1941-6016
DOI - 10.4249/scholarpedia.3528
Subject(s) - clamp , electrode , voltage clamp , voltage , materials science , computer science , electrical engineering , chemistry , psychology , neuroscience , engineering , electrophysiology , computer vision , clamping
Installation for the deposition of thin layers in the reactive vapor phase by plasma. The installation comprises a coaxial conductor, whose core is hollow and is used for introducing gas into a chamber having a row of openings. The conductor is also used for introducing the high frequency field necessary for exciting the gas. A substrate or sample holder moves beneath the row of openings. Application to the deposition of thin layers with a large surface.
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