In Deep UV Quantitative Analysis of Multi-Element Low Alloy Steel by Laser-Induced Breakdown Spectroscopy

The multi-element components of low alloy steel were quantified by using laser-induced breakdown spectroscopy (LIBS) in deep UV. The Nd:YAG pulsed laser was used to produce plasma. The spectrum was simultaneously obtained by deep UV spectrometer. This paper studied the influence of experiment parameters on LIBS spectral intensity, such as delay, energy of laser, and the distance between the focusing lens and the surface of the sample. With the optimal experiment parameters, the characteristic lines of C, Ni, Si, Cr and Cu contained in low alloy steel were selected for quantitative analysis and the calibration curves of these elements were obtained. The linear correlation coefficient was good. Using the calibration curves to quantitative analysis for the sample 05-d, and the relative error of analytical results is less than 10% for most elements.