Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Author(s) -
Stella Vallejos,
Naděžda Pizúrová,
Jan Čechal,
I. Gràcia,
C. Cané
Publication year - 2017
Publication title -
journal of visualized experiments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 91
ISSN - 1940-087X
DOI - 10.3791/56127-v
Subject(s) - materials science , chemical vapor deposition , microfabrication , zinc , silicon , chemical engineering , oxide , silicon oxide , nanotechnology , optoelectronics , metallurgy , silicon nitride , fabrication , medicine , alternative medicine , pathology , engineering
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