Physics-based virtual coherence scanning interferometer for surface measurement

Virtual instruments provide task-specific uncertainty evaluation in surface and dimensional metrology. We demonstrate the first virtual coherence scanning interferometer that can accurately predict the results from measurements of surfaces with complex topography using a specific real instrument. The virtual instrument is powered by physical models derived from first principles, including surface-scattering models, three-dimensional imaging theory, and error-generation models. By incorporating the influences of various error sources directly into the interferogram before reconstructing the surface, the virtual instrument works in the same manner as a real instrument. To enhance the fidelity of the virtual measurement, the experimentally determined three-dimensional transfer function of a specific instrument configuration is used to characterise the virtual instrument. Finally, we demonstrate the experimental validation of the virtual instrument, followed by virtual measurements and error predictions for several typical surfaces that are within the validity regime of the physical models.