Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System | Zendy

Gabriel Jobert | Zendy; Pierre Barritault | Zendy; Maryse Fournier | Zendy; Cyrielle Monpeurt | Zendy; Salim Boutami | Zendy; Cécile Jamois | Zendy; P. Bernasconi | Zendy; Andrea Lovera | Zendy; Daniele Braga | Zendy; C. Seassal | Zendy

Open Access

Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System

Author(s) -

Gabriel Jobert,

Pierre Barritault,

Maryse Fournier,

Cyrielle Monpeurt,

Salim Boutami,

Cécile Jamois,

P. Bernasconi,

Andrea Lovera,

Daniele Braga,

C. Seassal

Publication year - 2021

Publication title -

sensors

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.636

H-Index - 172

ISSN - 1424-8220

DOI - 10.3390/s21093181

Subject(s) - miniaturization , materials science , fluidics , microfluidics , optoelectronics , millimeter , photodetector , fabrication , particle (ecology) , lab on a chip , cmos , light scattering , scattering , optics , nanotechnology , physics , engineering , electrical engineering , medicine , oceanography , alternative medicine , pathology , geology

Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration.

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