Open AccessDemonstration of Atmospheric-Pressure Radiometer with Metamaterial Vanes
Author(s) -
Zhipeng Lü,
Mohsen Azadi,
George A. Popov,
Christopher Stanczak,
Pratik Ponnarassery,
Andy Eskenazi,
John Cortes,
Matthew F. Campbell,
Igor Bargatin
Publication year - 2021
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/micromachines2021-09558
Subject(s) - radiometer , materials science , reactive ion etching , deep reactive ion etching , etching (microfabrication) , optics , microfabrication , optoelectronics , composite material , layer (electronics) , physics , medicine , alternative medicine , pathology , fabrication