Open Access<strong>Rapid and Facile Fabrication of Wafer Scale Silicon Hierarchical Structures with Broadband Ultra High Anti-Reflection Property</strong>
Author(s) -
Harsimran Singh Bindra,
J. Leela Krishna,
Tushar Kumeria,
Ranu Nayak
Publication year - 2018
Language(s) - English
Resource type - Conference proceedings
DOI - 10.3390/ecms2018-05223
Subject(s) - materials science , wafer , etching (microfabrication) , silicon , reactive ion etching , nanotechnology , isotropic etching , wetting , dry etching , optoelectronics , composite material , layer (electronics)