Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air | Zendy

Haitham A. Al-Rawachy | Zendy; Heba T. Al-Saoor | Zendy

Open Access

Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air

Author(s) -

Haitham A. Al-Rawachy,

Heba T. Al-Saoor

Publication year - 2013

Publication title -

mağallaẗ ʻulūm al-rāfidayn

Language(s) - English

Resource type - Journals

eISSN - 2664-2786

pISSN - 1608-9391

DOI - 10.33899/rjs.2013.80284

Subject(s) - atomic physics , electron , radio frequency , distribution function , materials science , chemistry , analytical chemistry (journal) , computational physics , physics , electrical engineering , nuclear physics , thermodynamics , engineering , chromatography

In this study, the electron energy distribution function in capacitively coupled radio frequency dry air discharge in three different regions along discharge tube was measured. It was observed that all regions do have Fermi electron energy distribution function which increases in magnitude with increasing the applied power, and decreasing with increasing the internal pressure. This function magnitude reaches its highest value near the powered electrode, while it decreases towards the earthed one.

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