Open AccessUltrafast Dark-Field Surface Inspection by Hybrid Dispersion Laser Scanning
Author(s) -
Akio Yazaki,
Keisuke Goda,
Bahram Jalali
Publication year - 2015
Publication title -
eizō jōhō media gakkaishi/eizo joho media gakkaishi
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.1
H-Index - 12
eISSN - 1881-6908
pISSN - 1342-6907
DOI - 10.3169/itej.69.574
Subject(s) - ultrashort pulse , dispersion (optics) , field (mathematics) , dark field microscopy , optics , surface (topology) , laser scanning , laser , materials science , physics , geometry , mathematics , microscopy , pure mathematics