MICRO-SCALE DIAMOND HEMISPHERICAL RESONATOR GYROSCOPE | Zendy

Parsa Taheri-Tehrani | Zendy; Tsanh-Hung Su | Zendy; Amir Heidari | Zendy; G. Jaramillo | Zendy; Chen Yang | Zendy; Sina Akhbari | Zendy; Hadi Najar | Zendy; S. Nitzan | Zendy; Daisuke Saito | Zendy; Liwei Lin | Zendy; David A. Horsley | Zendy

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MICRO-SCALE DIAMOND HEMISPHERICAL RESONATOR GYROSCOPE

Author(s) -

Parsa Taheri-Tehrani,

Tsanh-Hung Su,

Amir Heidari,

G. Jaramillo,

Chen Yang,

Sina Akhbari,

Hadi Najar,

S. Nitzan,

Daisuke Saito,

Liwei Lin,

David A. Horsley

Publication year - 2014

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2014.77

Subject(s) - resonator , gyroscope , materials science , diamond , microelectromechanical systems , electrode , optoelectronics , voltage , helical resonator , q factor , vibration , quality (philosophy) , cantilever , acoustics , optics , electrical engineering , physics , engineering , composite material , quantum mechanics

This paper concerns a micro-scale gyroscope based on a 1 mm diameter diamond hemispherical resonator with embedded polysilicon electrodes. Frequency mismatch and quality factor of the wineglass vibration modes are studied. The device has embedded electrodes used for electrostatic transduction of resonator vibration and for electrostatic mode-matching. The air gap between the resonator and electrodes is small to increase the frequency tuning range for a given supply voltage. The 2θ-mode resonant frequency mismatch can be minimized from 2.4% to 0.1% by applying a low 2.5V tuning voltage.

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