MEMS AIR-MICROFLUIDIC SENSOR FOR PORTABLE MONITORING OF AIRBORNE PARTICULATES | Zendy

Frederick Doering | Zendy; Igor Paprotny | Zendy; R.M. White | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

MEMS AIR-MICROFLUIDIC SENSOR FOR PORTABLE MONITORING OF AIRBORNE PARTICULATES

Author(s) -

Frederick Doering,

Igor Paprotny,

R.M. White

Publication year - 2012

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2012.84

Subject(s) - particulates , materials science , microfluidics , microelectromechanical systems , fabrication , diesel exhaust , sensitivity (control systems) , resonator , particle size , optoelectronics , particle (ecology) , volume (thermodynamics) , diesel fuel , nanotechnology , electronic engineering , chemistry , organic chemistry , geology , medicine , physics , alternative medicine , oceanography , pathology , quantum mechanics , engineering

We present the design, fabrication, and experimental results of a MEMS air-microfluidic sensor for measuring the concentrations of airborne particulate matter (PM) such as tobacco smoke or diesel exhaust. Our sensor (25 mm × 21 mm × 2 mm in size) consists of an air-microfluidic circuit that separates the particles by size, then transports and deposits the selected particles onto the surface of a mass-sensitive film bulk acoustic resonator (FBAR). The rate of frequency change of the FBAR due to massloading corresponds to the particle concentration in the sampled air-volume. Our sensors exhibit a low-end detection limit of single μg/m. The small size of our sensor, combined with high sensitivity, enables it to be used in a portable PM monitor that can record personal PM exposure levels.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research